Even if two piezoelectric ceramic inputs with the same amplitude are used for parallel configuration of micro-robots, they cannot realize linear motion. It is assumed that the friction force on the working surface is uniform in the experiment, and their influence on the motion characteristics of micro-robot is ignored.<br> In order to improve the accuracy of linear motion positioning of micro-robot, the input voltage deviation compensation of piezoelectric ceramics is adopted on both sides to reduce the influence of component bearing defects and piezoelectric ceramic characteristics on robot motion. As shown in Figure 3-4, by setting the amplitude sum of sinusoidal input voltages of two piezoelectric ceramics, the difference between the output displacements of the two piezoelectric ceramics will occur. The difference of step size is compensated by the position deviation of the micro-robot when it moves linearly, and finally the precise control of the micro-robot moving forward is realized.
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