Laser etching is an application of lithography technology, the use of high-energy laser beam to vaporize materials in an instant, forming holes, slits, grooves, widely used in industrial heat treatment, welding, cutting and marking and other processing fields. In the field of photovoltaics, lasers can selectively remove materials through the ablation process, enabling the texture of silicon surfaces. As shown in the figure, during laser etching, the silicon wafer is placed in a hollow chamber, inside is a vacuum, nitrogen or SF4, the laser as an energy source to emit a specific frequency and wavelength of the laser beam through the NDF, prism, polarizing mirror, vertical exposure to the silicon surface, it is carved, the data results are saved by the DCC camera.
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