摘要:膜/基界面结合强度的测量与评价已成为硬质薄膜技术发展与应用的关键

Abstract: The measurement and evaluation of the bonding strength of the film/substrate interface has become a key issue in the development and application of hard film technology. A new measurement method-pulsed laser shock detection technology is proposed, and the mechanism and mathematical model of film shedding under the action of laser shock are analyzed. Taking the determination of the bonding strength of the stainless steel/TiN film interface as an example, the film is loaded with a pulsed laser of 650~1000mJ, and the surface observation of the film peeling is performed using a stereo microscope and a scanning electron microscope. Failure threshold. After analyzing the experimental data, the bond strength of the membrane/substrate interface was measured to be 4.954GW/cm², which verified the feasibility of the technology.

Abstract: The measurement and evaluation of the combined strength of the membrane/base interface has become a key issue in the development and application of hard film technology. A new measurement method, pulse laser impact detection technology, is proposed, and the structure and mathematical model of film shedding under the effect of laser impact are analyzed. Taking the determination of the binding strength of stainless steel/TiN film interface as an example, the membrane layer is loaded with a pulsed laser of 650 to 1000mJ, and the film shedding is observed by body microscope and scanning electron mirror, and the failure threshold of TiN film is determined according to the reflection signal detection method. After analyzing the experimental data, the binding strength of the membrane/base interface was measured to be 4.954GW/cm2 to verify the feasibility of the technology.

Abstract: the measurement and evaluation of the interfacial bonding strength between film and substrate has become a key issue in the development and application of hard film technology. A new measurement method, pulsed laser shock detection technology, is proposed. The mechanism and mathematical model of film shedding under laser shock are analyzed. Taking the interface bonding strength of stainless steel / TiN film as an example, the coating was loaded with 650 ~ 1000mj pulsed laser, and the surface of the film was observed by body microscope and scanning electron microscope, and the failure threshold of tin film was judged according to the reflected signal detection method. Through the analysis of the experimental data, the bonding strength of the membrane / substrate interface is 4.954gw/cm2, which verifies the feasibility of the technology.