First attack since the hole (100) plane back fewer keys, while the (111) plane of the slowest etch rate, so the final structure of the inverted pyramid is formed by the (111) plane consisting of
Since the cavity priority attacks the (100) face with fewer back keys and the slowest etching rate on the (111) face, an inverted pyramid structure consisting of (111) faces is formed
The inverted pyramid structure consisting of (111) surface is formed because the hole attacks the (100) surface with fewer back keys first and the etching rate is the slowest on (111) surface.<BR>