本实验所使用的3英寸铜试样均切割自12英寸Cu覆盖晶片。在实验之前，将

3 inches copper samples used in this experiment were 12 inches cut from a Cu blanket wafer. Prior to the experiment, a sample of Cu 0.025M solution of citric acid in 1 minute brushing and dried by N2 purge. This is defined as a reference, and the Cu surface with fresh. The following chemicals were used for the experiments: BTA (99%), FA / O II chelating agent (pH = 13.85), arginine (C6H14N4O2,98%), TritonX -100 (C (CH3) 3CH2C (CH3) 2-C6H4 (OCH2CH2) 10OH, 99%). The sample is immersed 0.05M BTA Cu was removed after 10min and N2 blown dry, then are used by 200ppmFA / O II chelating agent and varying concentrations of arginine (100,150,200,250 and 300 ppm of) the cleaning liquid composition, , different concentrations of arginine and 200 ppm TritonX -100 (1600,1800,2000,2200 and 2400ppm) for the cleaning liquid composition of the Cu contamination BTA PVA brush by a 5min 200ppmFA / O II chelating agent, the flow rate is set to 1L / min, adjusting the PH value of the diluted cleaning solution which is fixed at 10.8 KOH. JC2000D using a contact angle meter (available from Shanghai Zhongchen Limited) cleaning the contact angle measurement before and after the Cu surface, measured for each sample three sites were averaged. Atomic force microscope (AFM, Agilent 5600LS, USA) tapping mode measurement of the surface roughness of each of the copper coupon. In addition, the study Triton Cu-BTA wettability of the surface pairs is also X-100 by a contact angle experiment. Deionized water and Triton X-100 solution were dropwise a fresh copper surface of the specimen is contaminated BTA observe the change in contact angle. And measuring the surface tension of a solution of Triton X-100 (Fs of) using the hanging drop method.

The 3-inch copper specimens used in this experiment were cut from 12-inch Cu-covered wafers. Before the experiment, the Cu specimen was brushed with 0.025M citric acid solution for 1 minute and dried by blowing N2. This is used as a reference and is defined as a fresh Cu surface. The following chemicals were used in experiments: BTA (99%), FA/O II chelating agent (pH s 13.85), arginine (C6H14N4O2,98%), Triton X -100 (C (CH3) 3CH2C (CH3)2-C6H4 (OCH2CH2) 10OH, 99%). After 10min of the Cu specimen is immersed in 0.05M BTA solution and drained n2, then cleaned fluid consisting of 200ppm FA/O II chelating agent and different concentrations of arginine (100, 150, 200, 250 and 300ppm) respectively, consisting of 200ppm 200ppm argine and different concentrations of TritonX -100 (1600, 1800, 2000, 2200 and 2400 ppm) consisting of cleaning fluid swashes the PVA contaminated Cu PVA 5min, the flow is set at 1L/min, The PH of the cleaning fluid is adjusted with a diluted KOH to fix it at 10.8. Using the JC2000D contact angle gauge (purchased from Shanghai Zhongchen Limited) to measure the contact angle of the Cu surface before and after cleaning, each sample measures three points to average. The surface roughness of each copper specimen is measured using the Tap mode of atomic force microscope (AFM, Agilent 5600LS, USA). In addition, triton X-100's wetting ability to the Surface of Cu-BTA was studied through contact angle experiments. The deionized water and Triton X-100 solution were dropped on the surface of the fresh copper specimen contaminated by BTA to observe the change in its contact angle. The surface tension (Fs) of the Triton X-100 solution was determined by the dangling method.

The 3-inch copper samples used in this experiment are all cut from 12 inch Cu covered wafers. Before the experiment, the Cu sample was washed with 0.025m citric acid solution for 1 minute and dried by N2 purging. This is referred to and defined as the fresh Cu surface. The following chemicals are used for experiments: BTA (99%), FA / O II chelating agent (pH = 13.85), arginine (C6H14N4O2, 98%), TritonX-100 (C (CH3) 3ch2c (CH3) 2-c6h4 (och2ch2) 10Oh, 99%). Immerse the Cu sample in 0.05m BTA solution for 10min, take it out and dry it with N2, and then use the cleaning solution consisting of 200ppmfa / O II chelating agent and different concentrations of arginine (100, 150, 200, 250 and 300ppm), the cleaning solution consisting of 200ppmfa / O II chelating agent, 200ppm arginine and different concentrations of Triton X-100 (1600, 1800, 2000, 2200 and 2400ppm) to brush the polluted Cu with PVA Wash for 5min, set the flow rate to 1L / min, and adjust the pH value of cleaning solution with diluted KOH to fix it at 10.8. Use jc2000d contact angle measuring instrument (purchased from Shanghai Zhongchen Limited) to measure the contact angle of Cu surface before and after cleaning, and take the average value of three measuring points for each sample. The surface roughness of each copper sample was measured by atomic force microscope (AFM, Agilent 5600LS, USA). In addition, the wettability of Triton X-100 to Cu BTA surface was studied by contact angle experiment. Drop deionized water and Triton X-100 solution on the surface of fresh copper sample polluted by BTA respectively, and observe the change of contact angle. The surface tension (FS) of Triton X-100 solution was measured by suspension drop method.<br>