Select the three cross-sections scratched in each direction, calculate the width of each cross-section, and then calculate the average of the three wafer widths, so as to achieve the purpose of reducing errors.
Select the three sections of the scratch in each direction, calculate the width value of each section, and then calculate the average of the three wafer widths, so as to reduce the error.
Select three sections of scratches in each direction, calculate the width value of each section, and then calculate the average value of the three chip width, so as to reduce the error.<br>