In a previous study of Inumaru et a

In a previous study of Inumaru et al., the preparation of the crystallized stoichiometric and nitrogen-deficient B1-MoN films by pulsed laser deposition is reported. On the other hand, Stöber et al. reported that at 50% nitrogen content the Mo-N thin form crystallite sizes of 6.4 nm and a more pronounced texture of the γ-Mo2N structure. Saito and Asada have reported a phase change from the cubic γ-Mo2N to a B1-type MoN by increasing the N2+ ions implanted in sputtered Mo thin films at room temperature. Others reported the existence of a mixed phase of cubic γ-Mo2N and hexagonal δ-MoN crystalline structure as the nitrogen concentration increases in the plasma. Some others observed the crystalline γ-Mo2N phase in their films and when the nitrogen concentration increased to 50% the transition to an amorphous structure is reported. Anitha has found that γ-Mo2N is the only phase present as the nitrogen concentration increases.