The scratch uplift is defined as the difference between the highest position of the gallium arsenide atom in the z direction and the highest atom position of its initial surface after the scratching process.
After defining the scratch uplift for the scratch process, the difference between the highest position of the z-direction arsenide atom and the highest atomic position of its initial surface.
The scratch protrusion is defined as the difference between the highest position of gallium arsenide atom in Z direction and the highest position of its initial surface after scratching.<br>