摘 要：晶体定向粘结工序是其加工过程中的重要组成部分，粘接的结果对后续

Abstract: The crystal directional bonding process is an important part of its processing process, and the bonding results have an important impact on the processing and production of subsequent processes. This paper analyzes several factors that affect the results of crystal directional bonding, and proposes an optimized design scheme. The design scheme is verified by experiments. The directional bonding equipment designed by this method is worthy of popularization and use. <br>Keywords: crystal; orientation; bonding; high precision;

Abstract: Crystal directional bonding process is an important part of its processing process, the results of bonding on the subsequent process of processing and production has an important impact. This paper analyzes several factors that affect the result of crystal directional bonding, puts forward an optimized design scheme, and proves that the design scheme is feasible, and the directional bonding equipment designed by this method is worth popularizing.<br>Keywords: crystals; directional; bonding; high accuracy;

Abstract: the process of crystal directional bonding is an important part of its processing, and the result of bonding has an important influence on the subsequent process. In this paper, several factors affecting the results of directional bonding of crystals are analyzed, and an optimized design scheme is proposed. The experimental results show that the design scheme is feasible, and the directional bonding equipment designed by this method is worth popularizing.<br>Keywords: crystal; orientation; bonding; high precision;