Utilizing the positive piezoelectric effect of AlN piezoelectric material, when external excitation acts on the mass block, the cantilever beam is forced to vibrate.
By utilizing the positive piezoelectric effect of AlN piezoelectric material, when external excitation acts on the mass block, the cantilever beam is forced to vibrate.
Using the positive piezoelectric effect of AlN piezoelectric material, when external excitation acts on the mass, the cantilever beam is forced to vibrate.