但该工艺由于反应速率过快、过程难以控制，得到的 AlN 粉体形貌呈现不

However, this process because the reaction rate is too fast, the process is difficult to control, AlN powder morphology obtained irregular-shaped, single-crystal particles are easily formed in internal defects and a high concentration of non-equilibrium structure of the powder lower purity, while the large particles are prone to agglomeration area. Thus, the powder can affect the process material is obtained by firing the mechanical strength and thermal conductivity of the AlN substrate, it is not conducive for the purification of high-purity AlN powder of single crystal growth. Currently, the preparation of AlN powder using this technology is still in the laboratory research stage.

However, due to the rapid reaction rate and difficult to control the process, the resulting AlN powder appearance is irregular, single crystal particles are prone to high concentration defects and unbalanced structures, powder purity is low, and particles are prone to large-area reunion phenomenon. Therefore, the powder raw material obtained through this process affects the mechanical strength and thermal conductivity of the burned AlN substrate, and is not conducive to the purification of high-purity AlN powders for single crystal growth. At present, the preparation of AlN powder using this process is still in the laboratory research stage.

However, due to the rapid reaction rate and the difficulty in controlling the process, the morphology of AlN powder obtained by this process is irregular, and it is easy to form high concentration defects and non-equilibrium structure inside the single crystal particles. The purity of the powder is relatively low, and the particles tend to agglomerate in a large area. Therefore, the raw materials obtained by this process will affect the mechanical strength and thermal conductivity of AlN substrate, and will not be conducive to the purification of high-purity AlN powder for single crystal growth. At present, the preparation of AlN powder by this process is still in the stage of laboratory research.