MoO3 ceramics can not be well densified via conventional solid state method and a low relative density (ρ) was obtained (˜64.5% at 680 °C) with a permittivity (εr) ˜ 7.58, a quality factor (Qf) 35,000 GHz and a temperature coefficient of resonant frequency (TCF) − 39 ppm/°C. However, cold sintering at 150℃ using 4 wt% H2O at 150 MPa enhanced densification and give a relative ρ~76.8% and εr 8.31 but with a Qf of only ˜ 900 GHz. The addition of (NH4)6Mo7O24·4H2O further improved densification to give a relative ρ˜ 83.7% after annealing at 700 °C, resulting in a εr ˜ 9.91 with a Qf ˜ 11,800 GHz. We conclude therefore that oxides that are difficult to be sintered via a conventional solid state route may benefit from cold sintering but despite the higher density, lower Qf cannot be avoided due to the impurities and grain boundary phases that are introduced.