1.Verify that focus and astigmatism are small enough to be corrected within ~half of 30 N rms force budget for active correction.2.Determine radius of curvature to 0.5 mm.Determine off-axis distance to 2 mm and clocking angle to 50 arcseconds.
1.Verify that focus and astigmatism are small enough to be corrected within ~half of 30 N rms force budget for active correction.<br>2.Determine radius of curvature to 0.5 mm.<br>Determine off-axis distance to 2 mm and clocking angle to 50 arcseconds.