Although surface roughening of film

Although surface roughening of films holds an important role in determining the final surface morphologies and properties, how to control it is not yet well explored. Here, we report that the surface roughening of hafnium nitride films varies significantly as a stoichiometry-driven phase transformation takes place. Through a combination of surface morphological measurements and simulations, we demonstrate that the variation of roughening mechanisms arises from the changes in diffusion behavior during growth. This study shows that the phase transformation can induce surface roughening transition, thus providing a new handle in controlling the morphologies and physical properties of thin films.