GaAs have different atomic areal density and interlayer spacing, resulting in different numbers of atoms in contact during the scratching process. <br><br>Therefore, the normal force and friction force cannot be used to accurately describe the force between the abrasive particles and the workpiece during the scratching process. <br><br>The coefficient of friction is usually used for evaluation. <br><br>The average friction coefficient during the scratching process is defined as the ratio of tangential force to normal force. <br><br>The average friction coefficient of the GaAs crystal surface during the scratching process is shown in the figure. As the particle size of the abrasive particles increases, the forward force during the scratching process increases, and the increase trend is equal. <br><br>However, when the average friction coefficient is 5nm, the friction coefficient is close to 0.45, and with the increase of the abrasive particle diameter, the friction coefficient is continuously decreasing, and the downward trend is becoming smaller. <br><br>The change of the average friction coefficient can be described as a smooth curve.
正在翻译中..