As we all know, optical performance and electrical performance are important indicators of the quality of solar pools, black silicon has a very excellent trapping performance, but its electrical performance is not satisfactory, because the tiny nanostructure of the black silicon surface makes the carriere easy to compound, resulting in a large amount of efficiency loss, Even make the efficiency of black silicon solar cell than ordinary battery is lower, so the bluntization of black silicon solar battery is particularly important, through the use of dielectric passivation material can make the surface photozor compound greatly reduced, the commonly used passivation method is atomic deposition method,
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