• Problem scenario example 1 (short firing pattern based on customer EUV test lot)o P3 PZT voltage typically below 22 volts and P4 DPZT voltage below 550. In this condition, soft track movement is prevented due to the P4 DPZT voltage being below 550.o IBIS algorithm should try to find the appropriate IBI to initiate a reset but couldn’t execute due to the burst length are only 100 pulses continuously(125 pulses)o In the end, when P3 PZT voltage reaches its limiting threshold, hard track kicks in immediately to fast-desaturate P3 PZT voltage. This causes a significant WL disturbance and results in WL instability.