Previous studies report the elastic instability of B1-MoN structure. Koutná et al. have reported that the Mo0.91N (MoN1.09) structure is more stable than the perfect phase by ab initio calculations. Similar result has been found with first principles calculations, that indicate that the cubic MoNx with 0.54 < x < 1.3 is the most stable when containing both anion and cation vacancies. Donovan and Hubler have produced the metastable B1-MoN by electron beam evaporation deposition of molybdenum with simultaneous bombardment by nitrogen ions.