图7 GaAs在10 nm划擦距离处的俯视图，原子由z方向的高度着色（

Figure 7: Top view of GaAs at a scratching distance of 10 nm. The atoms are highly colored in the z direction (from left to right in order: 5, 6, 7, 8, 9, 10 nm) <br>. The average friction of the GaAs crystal surface during the scratching process The coefficient is shown in the figure. As the particle size of the abrasive particles increases, the forward force during the scratching process increases, and the increasing trend is equal. However, when the average friction coefficient is 5nm, the friction coefficient is close to 0.45, and as the diameter of the abrasive particles increases, the friction coefficient is constantly decreasing, and the downward trend is becoming smaller.

Figure 7 Top view of GaAs at 10 nm scratch distance, atoms colored by the height of z direction (from left to right are 5, 6, 7, 8, 9, 10nm)<br>The average friction coefficient of the surface of the GaAs crystal during the scratch is shown, and as the particle size increases, the forward force in the scratch process is increased, and the increase trend is equal. However, when the average coefficient of friction is 5nm, the coefficient of friction is close to 0.45, and with the increase of the diameter of the grain, the coefficient of friction is increasing, and the downward trend is smaller.

Figure 7 top view of GaAs at 10 nm scratch distance, atoms are highly colored in Z direction (5, 6, 7, 8, 9, 10 nm from left to right)<br>The average friction coefficient of GaAs crystal surface during scratching is as shown in the figure. With the increase of particle size, the positive force increases during scratching, and the increasing trend is equal. However, when the average friction coefficient is 5nm, the friction coefficient is close to 0.45, and with the increase of the diameter of the abrasive particles, the friction coefficient is constantly smaller, and the downward trend is smaller.<br>