目前，高成本和工艺条件苛刻是RIE亟需解决的问题，最近的室温RIE制绒

At present, high costs and harsh process conditions RIE is needed to solve the problem, most recently at room temperature RIE texturing of monocrystalline silicon technology can provide an important reference, but for MACE, we need to make the texturing process more manageable

At present, high cost and harsh process conditions are an urgent problem to be solved by RIE, the recent room temperature RIE velvet monocrystalline silicon process can provide an important reference, but for MACE, the velvet process needs to be more controllable

At present, the high cost and harsh process conditions are the problems that RIE needs to solve. The recent room temperature RIE cashmere single crystal silicon technology can provide important reference for it. However, for mace, it is necessary to make the cashmere technology more controllable<BR>