The performance required for the sample stage of the MALDI analysis is proper moving speed that affects the analysis speed, movement accuracy that matches the laser focus position with the center of the spot, and the compatibility with vacuum not to damage the high vacuum of MicroIDSys. The sample stage of MicroIDSys implements high speed analysis by moving speed of 60 mm/sec, precise positioning to perform up to 288 spot analysis in one batch analysis by movement precision of ±10 µm (±0.01 mm), and high vacuum of 10-7 Torr is achieved by high vacuum compativility.