清洗前后的各个铜试样的AFM图像显示在图7（s,a-e,a’’-e’’

Washing the sample before and after the respective copper AFM image shown in FIG. 7 (s, ae, a '' - e ''), the corresponding value of surface roughness (Rq of) shown in Table 3. An effective cleaning solution should result in a low surface roughness while removing the cleaning object. For comparison more clear, we choose a set of surface roughness of copper samples BTA worst pollution is 15.6nm, the present study as a reference object. Can be found using copper samples after washing, the copper surface roughness with increasing concentration of arginine is increased, compared with the reference sample are improved 200ppmFA O II and various concentrations of arginine /, but the overall rough value is somewhat high, and as seen from the figure a copper surface to scratches, b and c in FIG observed in the pit, with other experimental results, described FA / O II + arginine cleaning solution, although capable of effective removal of BTA, but will cause some corrosion of copper. Therefore, we must be optimized to improve the set of the washing liquid and small roughness of the copper surface defects after cleaning.

The AFM image of each copper specimen before and after cleaning is shown in Figure 7 (s, a-e, a''-e') and the corresponding surface roughness value (Rq) is listed in Table 3. An effective cleaning solution should result in low surface roughness while removing the cleaning object. In order to make the contrast more clear, we selected a set of copper samples with the worst surface roughness of 15.6 nm of BTA pollution as the reference object for this study. It can be found that after cleaning the copper sample with 200ppm FA/O II and different concentrations of arginine, the copper surface roughness value increased with the increase of arginine concentration, but compared with the reference sample, but the overall roughness value was still higher, and the copper surface was observed scratched from Figure a, the corrosion pit was observed in Figure b and Figure c, combined with other experimental results, indicating that FA/O II Therefore, we must optimize this group of cleaning fluid to improve the roughness and small defects of the copper surface after cleaning.

AFM images of each copper sample before and after cleaning are shown in Figure 7 (s, A-E, a '- E'), and the corresponding surface roughness values (RQ) are listed in Table 3. The effective cleaning solution should remove the cleaning object and cause low surface roughness In order to make the comparison more clear, we selected a group of BTA polluted copper samples with the worst surface roughness of 15.6nm as the reference object of this study. It can be found that after cleaning the copper sample with 200 ppmfa / O II and different concentrations of arginine, the surface roughness value of copper increases with the increase of arginine concentration, but it is improved compared with the reference sample, but the overall roughness value is still high, and scratch is observed on the copper surface from figure a, etch pits are observed in Figure B and figure C. combined with other experimental results, FA / O I is shown Although I + arginine detergent can effectively remove BTA, it will cause certain corrosion to copper. Therefore, we must optimize the cleaning solution to improve the surface roughness and small defects of cleaned copper.<br>