Single-crystals are important in many applications ranging from synthetic gemstones for jewelry to hosts for solid-state lasers. For some applications, ceramic materials must be prepared as single-crystals. When used as substrates for thin film growth (e.g. gallium-on-sapphire technology or the growth of superconductor thin films) it is the crystalline perfection of a single-crystal that is important. Wide bandgap semiconductors such as silicon carbide (SiC) and gallium nitride (GaN) have drawn a lot of attention in power applications due to their superior material properties such as high critical electric field resulting in a minimum of 10 times higher breakdown voltage or a 100 times smaller on-resistance than Si. These unique properties of SiC and GaN materials have made them promising candidates for future high power, high frequency semiconductor devices. In optical applications, e.g. the use of ruby and yttrium–aluminum–garnet (YAG) for laser hosts and quartz and sapphire for optical windows, single-crystals are used to minimize scattering or absorption of energy. In piezoelectric materials, e.g. quartz, the optimum properties are obtained in single-domain single-crystals. Some of the applications that utilize the desirable optical, electrical, magnetic, or mechanical properties of ceramic single-crystals.Substrate diameters for the single-crystal have been steadily increasing since the commercial introduction of substrates in 1990 and crystal defects have been greatly reduced in the past 15 years. Commercial devices are available, but their widespread use will depend on the ability of growers to make large, inexpensive, defect free materials available.While various methods for measuring the defect of single-crystal thin films have been presented until now, the most typical method for measuring the crystalline quality (degree of average defect) of single-crystal thin films that have wide area (2 inch, 4 inch and 6 inch, etc.) is X-ray diffraction (XRD) method with parallel X-ray beam. However, this method can easily create a great error margin as the result value is analysed to be very different depending on the measuring process and conditions of the user or the pre-treatment of sample, etc.Therefore, a standard on universal measurement methods and conditions is absolutely necessary.Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam