Fine AIN powder was synthesized by the vapour-phase reaction of AICI 3 and NH 3 at 600 to1100 ~ C, and the particulate characteristics and the deposition features were investigated. The powder deposited near the AICI 3-feeding nozzle included radially-grown particles with columnar crystals. The powder deposited apart from the AICI3-feeding nozzle consisted of only fine, spherical particles. Vapour-phase reaction at 1100~ produced fine powder, which was characterized by uniform and fine particle size; its distribution width was from 0.1 to 0.3/~m, and median diameter was 0.18 #m. Deposition area of the powder was affected by the reaction temperature and the temperature profile in the reactor.