This is to find out the cause of the abnormal phenomena on the surface of 650V FRD products, and summarize the experimental data. It includes 1. cross-section (SEM), 2. abnormal area step meter test, 3. low yield wafers data comparison before and after vacuum alloy, back metal rework, 4. surface chemical composition analysis (EDS), 5. short loop process test (polyimide curing temp spilit). please confirm it, thankk.
This is to find out the cause of the abnormal phenomena on the surface of 650V FRD products, and summarize the experimental data. It includes 1. cross-section (SEM), <br> 2. abnormal area step meter test, <br> 3. low yield wafers data comparison before and after vacuum alloy, back metal rework, <br> 4. surface chemical composition analysis (EDS), <br> 5. short loop process test (polyimide curing temp spilit).<br> please confirm it, thankk.
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