If the procedure is not followed co

If the procedure is not followed correctly, there is a potential risk that samples with a too high amount of fluoride on the pads are transported to the backend site, and that corrosion of the aluminum is taking place prior to wire bonding leading to potential failures in the application at customer site.This document is generated to avoid analytical risks, such as using non-calibrated tools, or tools which are not suited at all due to poor detection limits, not able to analyse the samples of interest with suitable sensitivity. Furthermore the limits and guidelines as mentioned in section 6.2 to 6.5 have been carefully aligned through ‘round robin’ experiments across the labs. These levels cannot easily transferred to other tools without a comparable analyses, as those values depend very much on tool geometries an setup as well as and energetical settings.