In this study, the indentation results for a 1 µm diamond tip radius are presented. A 100 µm was also briefly used to explore effects of changing parameters on larger tip radii,but only 1 µm results are provided in this dissertation since the gathered data is comprehensive. However, with a 100 µm tip,one is able to achieve higher contact loads(hundreds of µN) at lower penetration depths than with a 1 µm tip. The tradeoffs, however, are a greater activated sample volume probed, larger residual stress/strain fields, and scaleand phase separability issues.