1. Principle of MEMS pressure senso

1. Principle of MEMS pressure sensor: 1) Piezoresistive effect of polycrystalline silicon nanofilm. 2. How to evaluate the performance of MEMS pressure sensors? Performance evaluation includes measurement range, measurement accuracy, temperature range, linearity, etc. 3. How innovative is this research? 1) Innovation includes using the piezoresistive effect of polysilicon nanofilm and sacrificial layer technology to improve the sensitivity of the sensor while reducing the size of the sensor. 2) Innovation includes using a composite film of graphene and perovskite to improve the response speed and responsivity of the detector, which takes advantage of the fast electron transmission effect of graphene and the high light absorption characteristics of perovskite. At the same time, the detector is guaranteed to have excellent flexibility performance. 4. What specific tasks did you undertake in the above projects? 1) I am mainly responsible for project application and defense, as well as the specific implementation and completion of the project. 5. Please explain in detail the future work content, such as which wide bandgap semiconductors, what problems currently need to be solved, and how to solve them? Which wide bandgap semiconductor materials and optoelectronic devices will be studied specifically in the future? 1) In the future, we will mainly engage in research on wide bandgap semiconductor materials such as gallium oxide and aluminum nitride, including preparation processes and performance characterization. At the same time, we will explore its application research in the fields of solar blind UV detectors and solar blind UV 3D imaging. 2) Regarding the problem of low thermal conductivity of gallium oxide films during application, I will use composite films to solve this problem, such as graphene-gallium oxide composite films. 3) In the future, I will also carry out industry-university-research work in the field of semiconductor materials and optoelectronic devices to solve problems existing in practical applications. 4) In the future, industry-university-research work will be carried out in the field of semiconductor materials and optoelectronic devices, focusing on cutting-edge and demand-driven. 6. Postdoctoral supervisors and postdoctoral students jointly trained by schools and enterprises. 1) The company's research content mainly focuses on the application of electromagnetic sensors in banknote detection. 2) The school’s research content is mainly photoelectric detectors, and I guided a doctoral student to conduct research. 7. Why did you change jobs and why did you want to come to Shenzhen University of Technology? 1) Aobi Zhongguang’s future business focus is robotic equipment. Based on my own work experience, from the perspective of personal long-term development, I need to change jobs. 2) Combining my research background and work experience, I think it meets the current recruitment needs of optoelectronic integrated chips, and I am very interested in this. 8. What are the future teaching plans? 1) First of all, in terms of teaching courses, I think I can engage in courses on semiconductor materials and optoelectronic devices. 2) Secondly, the teaching method is planned to combine theory and practice. 3) Achieve the purpose of applying what you have learned. 4）Allow students to turn designs into reality.