The semiconductor industry is mainly composed of integrated circuits, discrete semiconductor devices, optoelectronic devices and sensors, among which integrated circuits are the largest component of the semiconductor industry and also an important application field of sputtering targets. With the rapid development of information technology, the integrated circuit is required to be more and more integrated, and the size of unit devices in the circuit is shrinking continuously, and the size of components is from millimeter to micron, and then to nanometer. The interior of each unit device consists of substrate, insulating layer, dielectric layer, conductor layer and protective layer, among which the dielectric layer, conductor layer and even protective layer all need sputtering coating technology, and sputtering target is one of the core materials for preparing integrated circuits.
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