摘要:膜或者基界面结合强度的测量与评价已成为硬质薄膜技术发展与应用的关

Abstract: The measurement and evaluation of the bonding strength of the film or substrate interface has become a key issue in the development and application of hard film technology. A new measurement method-pulsed laser shock detection technology is proposed, and the mechanism and mathematical model of film shedding under the action of laser shock are analyzed. Taking the measurement of the bonding strength of the stainless steel or TiN film as an example, the film is loaded with a pulsed laser of 650~1000mJ, and the surface of the film is observed by a stereo microscope and a scanning electron microscope, and the TiN film is judged according to the reflection signal detection method. Failure threshold. After analyzing the experimental data, the bonding strength of the membrane or substrate interface was measured to be 4.954GW/cm², which verified the feasibility of the technology.

Abstract: The measurement and evaluation of the binding strength of film or base interface has become a key issue in the development and application of hard film technology. A new measurement method, pulse laser impact detection technology, is proposed, and the function and mathematical model of film shedding under the effect of laser impact are analyzed. Taking the determination of the binding strength of stainless steel or TiN film interface as an example, the membrane layer is loaded with a pulsed laser of 650 to 1000mJ, and the surface observation of film shedding is made by body microscope and scanning electron mirror, and the failure threshold of TiN film is determined according to the reflection signal detection method. After analyzing the experimental data, the binding strength of the membrane or base interface was measured to be 4.954GW/cm2 to verify the feasibility of the technology.

Abstract: the measurement and evaluation of the bonding strength of the film or substrate interface has become a key problem in the development and application of hard film technology. A new measurement method, pulsed laser shock detection technology, is proposed. The mechanism and mathematical model of film shedding under laser shock are analyzed. Taking the determination of the interfacial bonding strength of stainless steel or tin film as an example, the coating was loaded with 650 ~ 1000 MJ pulsed laser, and the surface of the film was observed by body microscope and scanning electron microscope, and the failure threshold of tin film was judged according to the reflected signal detection method. Through the analysis of the experimental data, the bonding strength of the film or substrate interface is 4.954gw/cm2, which verifies the feasibility of the technology.