In order to reduce the impact of the error on the simulation results, three scratches were selected from each of the five scratch directions of the three wafers to take three cross sections.
In order to reduce the impact of error on the simulation results, three sections were taken for each scratch in the five scratch directions of the three wafers.
In order to reduce the influence of the error on the simulation results, three sections are cut from each scratch in five scratch directions of three kinds of chips,