4.4 GaAs的各向异性对划痕形成的影响根据GaAs材料在实际应用过

4.4 The influence <br>of GaAs anisotropy on the formation of scratches According to the actual application process of GaAs materials, GaAs is selected as (100) bias (111) 2 °, (100) bias (111) 6 °, (100) These three types of crystal planes are (111) 15 ° off. The three crystal plane models established are as follows

4.4 Effects of anisotropy of GaAs on scratch formation<br>According to how much GaAs material sits in practical application, this article GaAs selects three types of crystal surfaces of the three types of (100) bias (110) 2 degrees, (100) bias (111) 6 degrees, and (100) bias (111) 15 degrees. The three crystal surface models are established as follows

4.4 effect of anisotropy of GaAs on scratch formation<br>According to the number of GaAs Materials in practical application, three types of GaAs are selected in this paper, namely (100) biased (111) 2 °, (100) biased (111) 6 °, (100) biased (111) 15 °. Three kinds of crystal surface models are established as follows<br>