4.3. Paint Should Be Cured 4.3.1. In principle,stainless steel(SUS #400) or anti-static paint is used in equipment frame ,Paint should meet the following standards. 4.3.1.1. Basically Poly Urethane resin paint shall be used for pre-process. 4.3.1.2. Paint part shall not peel off, stain or have other colors. 4.3.2. Spare parts bought from market shall be according with the standard color of spare part maker.4.4. Paint characteristics. 4.4.1. Paint material does not evaporate4.5. The Length From Mc/ Down Side To Room Bottom:100±10mm4.6. The system must meet SEMI E78 level 1 static charge specification