To present more details in terms of intergranular nanostructure of MLV device and the polymer distribution at the interface between ZnO grains, TEM (transmission electron microscopy) and STEM-EDS (Scanning Transmission Electron Microscopy – Energy Dispersive Spectroscopy) were performed. Figure 4 shows TEM and STEM-EDS images of both ceramic-polymer/metal and ceramic/polymer interfaces in the cold sintered MLV device. Figure 4a represents a multilayer body and the rectangular frames show different spots of the multilayer device where is being examined by TEM. STEM-EDS images (Figure 4b,c) confirm that a clean interface of Cu/ZnO-PEI is obtained at a nanoscale and that the interdiffusion between Cu-metal and ZnO/PEI does not occur, as opposed to the device is fabricated at 220 °C (Figure S1 in the Supporting Information) where interdiffusion may occur (Figure S2b and S2c in the Supporting Information).