图 9 划痕实际深度和弹性回复率变化图在抛光加工过程中，材料表面会出现

Figure 9 The actual depth of scratches and the change of elastic recovery rate <br>During the polishing process, the phenomenon of elastic recovery will occur on the surface of the material. And the smaller the scale, the more obvious the elastic recovery. Therefore, calculate the actual depth of the scratch under different theoretical depths, and obtain the graph shown in Figure 9(1). It was found that as the particle size of the abrasive particles increases, the actual width of the scratch increases first and then decreases. The formula for defining the elastic recovery rate of scratches is as follows:

图 9 划痕实际深度和弹性回复率变化图<br>在抛光加工过程中，材料表面会出现弹性回复的现象。并且在尺度越小的情况下，弹性回复越明显。因此计算不同理论深度下，划痕的实际深度，得到如图9（1）所示的曲线图。发现随磨粒粒径的增大，划痕的实际宽度，先增大后减小。定义划痕的弹性回复率公式如下所示：

Fig. 9 change of actual depth and elastic recovery rate of scratch<br>In the process of polishing, the surface of material will appear the phenomenon of elastic recovery. And the smaller the scale, the more obvious the elastic recovery. Therefore, calculate the actual depth of scratch under different theoretical depth, and get the curve as shown in Fig. 9 (1). It is found that the actual scratch width increases first and then decreases with the increase of particle size. The formula for defining the elastic recovery rate of scratches is as follows:<br>