With the advancement of materials and science and technology, the engineering field is launching products with light weight, small size and high performance, making the robot system more intelligent. The pursuit of a more compact and flexible structure makes the system more flexible, but it also brings thorny control problems. Internal uncertainties such as external disturbance, friction, structural flexibility and neglected high-order dynamics can all cause vibration problems. Structural vibration will affect the positioning accuracy and speed of the system to a certain extent, and even shorten the service life of the system. Therefore, The research on vibration control of flexible structures is urgent. In this paper, the research is mainly carried out from three aspects: dynamic modeling of manipulator, vibration detection and active vibration control.
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