Silicon is also bonded to a second silicon wafer using anodic bonding. A thin (≈4 mm) layer of glass is sputtered on one of the layers, and a much lower voltage of approximately 50V is applied [4].
Silicon is also bonded to a second silicon wafer using anodic bonding. A thin (≈4 mm) layer of glass is sputtered on one of the layers, and a much lower voltage of approximately 50V is applied [4].