在更换过滤器无效后,我们更换了气盘上的过滤器.在拆卸过程中,我们发现过

After replacing the filter was invalid, we replaced the filter on the air plate. During the disassembly process, we found that there was white condensate on the inner wall of the filter input end pipeline. This situation became more serious at the MFC input end. White crystals only appeared in the silane pipeline, not in the phosphane pipeline.

After the replacement filter was not effective, we replaced the filter on the air disk. During removal, we found white condensation on the inner wall of the filter input line. This situation becomes more severe at the MFC input. White crystallines appear only in silane lines and not on phosphate lines.

After the filter replacement failed, we replaced the filter on the air disk. During the disassembly process, we found white condensation on the inner wall of the filter input pipe. This situation became more serious at the MFC input end. The white crystal only appeared in silane pipeline, but not in phosphine pipeline.<br>