Open air atmospheric pressure plasma jet (APPJ)enhanced chemical vapour deposition process was used todeposit biocompatible SiOx/TiOx composite coatings. Theas deposited films are hydrophilic and show visible lightinduced photocatalytic effect, which is a consequence ofthe formation of defects in the TiOx structure due to theplasma process. This photocatalytic effect was verified bythe demonstration of an antimicrobial effect under visiblelight on E. coli as well as by degradation of RhodamineB. The films are non-cytotoxic as shown by the cytocompatibility tests. The films are conductive to cell growthand are stable in DMEM and isopropanol. The structuralevaluation using SEM, EDS and XPS shows a dispersionof TiOx phase in a SiOxCyHz matrix. These analyses wereused to correlate the structure-property relationship of thecomposite coating.