Hong Shihao et al. prepared a nano-textured surface with a reflectivity of 13.6% on the polysilicon surface by RIE method, which is 14% lower than the reflectivity of traditional acid etching.
Through the RIE method, Hong Shihao and others prepared nano-velvet with a reflectivity of 13.6% on the polysilicon surface, which is 14% lower than the reflectivity of traditional acid etching.
Hong Shihao et al. Prepared nano textured surface with 13.6% reflectivity on polysilicon surface by RIE method, which is 14% lower than that of traditional acid etching<BR>